Products Description

A silicon carbide ceramic wafer boat is a critical carrier tool used in semiconductor manufacturing and high-temperature heat treatment processes. It is typically made of high-purity, high-density reaction-bonded or pressureless sintered silicon carbide material, possessing a unique crystal structure and excellent physical and chemical properties. Its design is primarily used to safely carry and transport silicon wafers or other semiconductor substrates during high-temperature processes such as diffusion, oxidation, and chemical vapor deposition (CVD).

Silicon Carbide Ceramic Wafer Boat

product details

Product name	Silicon Carbide Ceramic Wafer Boat
Color	Customized according to the client's requirements
size	Customized according to the client's requirements
Packaging	Carton /Pallet/Wooden case (According to client requirement )
Delivery time	Standard Product-Within 3 days
Items Design	According to the client's drawing or samples
Features	Good quality, low price, Multiple factories, deliver to you based on the one closest to your location
Application	Industrial Ceramics
Certificate	ISO, CE

Products performance

Exceptional High-Temperature Resistance: Capable of long-term stable operation in inert or oxidizing atmospheres at temperatures above 1600°C. It exhibits a low coefficient of thermal expansion, excellent thermal shock resistance, and can withstand rapid heating and cooling cycles.
Extreme Chemical Stability: Demonstrates strong resistance to most acids, alkalis, and corrosive gases. It is particularly resistant to hydrofluoric acid (HF) corrosion and is less prone to reacting with process gases at high temperatures.
Excellent Structural Strength and Creep Resistance: Maintains high mechanical strength and rigidity at extremely high temperatures, resisting self-deformation (high-temperature creep). This ensures stable wafer spacing and prevents wafer warping or sticking.
High Purity and Low Contamination: The material itself is of very high purity, with minimal metal impurity migration at high temperatures. It also possesses outstanding resistance to particle generation, minimizing contamination of the process chamber and wafers.
Good Thermal Conductivity and Electrical Conductivity: Its thermal conductivity is superior to most ceramics, contributing to temperature uniformity during processes. It also exhibits some electrical conductivity, helping to avoid static charge accumulation.

Products Applications

Semiconductor Chip Fabrication: Serves as a core carrier component in equipment such as diffusion furnaces, oxidation furnaces, and low-pressure chemical vapor deposition (LPCVD) furnaces for critical high-temperature processes including boron/phosphorus diffusion, thermal oxidation, and polysilicon/silicon nitride deposition on silicon wafers.
Photovoltaic Solar Cell Production: Used in high-temperature process steps like phosphorus diffusion and firing during crystalline silicon solar cell manufacturing.
LED Epitaxial Wafer Preparation: Acts as a carrier tray for substrates like sapphire or silicon carbide in equipment such as MOCVD reactors for the epitaxial growth of materials like GaN.
Other High-Temperature Heat Treatment Fields: Also widely used in high-temperature sintering, heat treatment, and transport processes in fields such as metallurgy, glass, ceramics, and powder sintering.

Products Parameters

Number	Performance	Unit	Silicon Carbide	Silicon Carbide
			Silicon Carbide	Silicon Carbide
			SiSiC	SiC
1	Density	g/cm3	3.05	3.0-3.1
2	Flexural strength	MPa	250	450～500
3	Fracture toughness	MPa·m1/2	4	4
4	Dielectric constant	εr(20℃,1MHz)	9~10	9~10
5	Hardness	GPa	20	24
	Hardness	HRC	85	87
6	Volume resistivity	Ω·cm(20℃)	10-2~1012	10-2~103
7	Elastic modulus	GPa	330	440
8	Coefficient of thermal expansion	×10-6/k	4.5	4.1
9	Compressive strength	MPa	550	2500
10	Abrasions	g/cm2	0.01	0.01
11	Thermal conductivity	W/m×k(20℃)	45	84
12	Poisson's ratio	/	0.16	0.16
13	Insulation strength	kv/mm		100
14	Temperature	℃	1380	1600

quality control

In strict adherence to the ISO 9001 Quality Management System, we implement full-process quality control to ensure the consistent delivery of high-quality products:

• 100% inspection of raw materials, guaranteeing quality from the source
• Utilization of advanced hot-pressing production lines for stable and reliable processes
• A comprehensive in-house testing system covering density, hardness, and microstructure analysis
• Availability of third-party authoritative certifications (including SGS, CE, ROHS, etc., provided upon request)

We remain committed to continuous improvement of our management system, providing customers with consistent and reliable product assurance.

certificate

why choose us

We are a manufacturer and supplier of ceramics. We have a professional Silicon carbide crystal boat production factory and team. In addition, we focus on the research development, and production of various ceramics, and we also have a company in the United States. We provide quite professional and sincere service. If you need any high-quality Silicon carbide ceramic wafer boats or other ceramic manufacturers and long-term overseas partners, please feel free to contact us. We support any high-difficulty customization, and we will do our best to meet your needs.

If you have any questions about the Silicon carbide wafer boat, you can click the Contact Us button immediately, and there will be professional customer service to answer your questions.
In the ceramic industry, we provide the most professional and sincere service. Before purchasing, if you have any unclear points about our products, you can contact us at any time, and we will reply to you in the shortest time to solve your doubts and concerns.
Looking forward to hearing from you!