ZERODUR Machinable Glass Ceramic

ZERODUR is a high-performance glass-ceramic known for its most prominent feature: a coefficient of thermal expansion (CTE) close to zero, providing exceptional dimensional stability over a wide temperature range. Although the name contains "ceramic," it is technically a glass that undergoes a special heat treatment (ceramization), forming uniformly distributed nano-crystals within its structure, which gives it its unique physical properties. The term "machinable" refers to the fact that it can be relatively easily shaped using conventional glassworking techniques (such as cutting, drilling, grinding) in its "green" state before the final ceramization. It is subsequently transformed into its final zero-expansion state through this heat treatment.

• Extreme Thermal Stability and Near-Zero Expansion: Its average coefficient of thermal expansion is close to zero across a broad temperature range around room temperature. This means environmental temperature changes cause almost no dimensional change to the material, which is its core advantage as a substrate for high-precision platforms and optical components.
• Excellent Structural Homogeneity and Isotropy: The material's internal structure is uniform, and its physical properties (such as expansion coefficient, Young's modulus) are consistent in all directions, avoiding deformation or stress issues caused by directional differences.
• High Hardness and Wear Resistance: It has high surface hardness, good wear resistance, and scratch resistance, making it suitable for applications requiring long-term surface precision.
• Good Chemical Stability: It exhibits good resistance to water, acids, alkalis, and organic solvents, suitable for various environments.
• Vacuum Compatibility: The material is non-porous, non-hygroscopic, and has an extremely low outgassing rate, fully meeting the requirements for high and ultra-high vacuum environments.
• Machinability: In its "green glass" state before final ceramization, it can be machined. After full ceramization, although very hard, it can still be ultra-precision ground and polished using diamond tools to achieve optical surface quality.

• Coefficient of Thermal Expansion (CTE, 0°C to 50°C): ≈ 0 ± 0.10 x 10⁻⁶ /K (Different accuracy grades are available, e.g., "Class 0", "Class 1", "Class 2", with varying ranges).
• Density: Approximately 2.53 g/cm³.
• Young's Modulus: Approximately 90.3 GPa.
• Poisson's Ratio: Approximately 0.24.
• Thermal Conductivity (20°C): Approximately 1.46 W/(m·K).
• Specific Heat Capacity (20°C): Approximately 0.80 J/(g·K).
• Maximum Operating Temperature (Long-term): Approximately 500°C.
• Transparency: Opaque, typically white or light in color.

Based on its unparalleled dimensional stability and comprehensive physical properties, ZERODUR is widely used in fields with extremely demanding requirements for thermal deformation resistance and long-term stability:

• High-End Optics and Astronomy:

Mirror Blanks for Large Astronomical Telescopes: The material of choice for primary and secondary mirrors of major ground-based and space telescopes worldwide (e.g., the Very Large Telescope VLT, the Large Synoptic Survey Telescope LSST).

Optical Systems for Lithography Machines: Used for reflector substrates in core semiconductor manufacturing equipment like Extreme Ultraviolet (EUV) lithography scanners.

High-Precision Reflectors and Flat Mirrors: Used in laser interferometers, satellite Earth observation systems, and space telescopes.

• Precision Measurement and Metrology:

Reference Scales and Etalons: Serves as highly stable physical standards for length and angle measurement.

Optical Cavities for Laser Gyroscopes: Provides a stable resonant cavity for high-precision inertial navigation systems.

Interferometer Platforms and Bases: Used in ultra-precision measurement equipment such as gravitational wave detectors (e.g., LIGO) and nano-scale surface topography measurement systems.

• Semiconductor Manufacturing and Inspection Equipment:

Wafer Stages and Reticle Stages: Carries silicon wafers or reticles in lithography and inspection equipment, requiring nanometer-level thermal stability and flatness.

Bases for Precision Motion Platforms: Provides a rigid and stable foundation for the precision positioning systems of such equipment.

• Aerospace and Scientific Research:

Satellite Structural Components and Optical Support Structures: Maintains shape and dimensions in the drastically changing temperature environment of space.

High-Energy Physics Experimental Apparatus: Such as support structures or reflectors for particle detectors.

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