The semiconductor industry, as the core foundation of modern electronic information technology, is witnessing continuous iteration and upgrading of its equipment technologies, driven by the rapid development of sectors such as 5G communications, artificial intelligence, and new energy vehicles. Particularly, the advanced semiconductor manufacturing processes-including high-temperature thin-film deposition, crystal growth, and ion implantation-impose near-extreme demands on the high-temperature resistance, corrosion resistance, and thermal shock resistance of their core components.
In the face of material performance limits in semiconductor manufacturing, advanced ceramic materials are gaining strategic importance. A prime example is the critical graphite components used in processes such as thin-film deposition and high-temperature diffusion, where they serve as substrate carriers and heating elements. However, traditional graphite materials present significant challenges: under exposure to metal-organic compounds and corrosive gases, they are prone to surface corrosion and particle shedding. This not only drastically reduces component lifespan but also contaminates wafer surfaces with graphite particulates, severely impacting production yield.
To address these issues, silicon carbide (SiC) has emerged as a groundbreaking coating material for graphite components. With its exceptional thermochemical stability, high thermal conductivity, oxidation resistance, corrosion resistance, and a thermal expansion coefficient similar to graphite, SiC coatings effectively immobilize surface particles while enhancing thermal conductivity and improving heat distribution uniformity. This innovative solution overcomes the longstanding technical hurdles in semiconductor manufacturing, paving the way for higher efficiency and reliability in advanced processes.
Superior Ceramics Times
The silicon carbide (SiC) coating industry faces exceptionally high entry barriers, primarily manifested in three key aspects: monopolized manufacturing technologies, prolonged development and certification cycles, and extreme difficulties in penetrating established supply chains. Currently, the market is predominantly dominated by developed nations such as the United States and Japan, creating significant supply chain vulnerabilities for China's semiconductor industry.