Products Description
Alumina Ceramic Deposition Rings serve as critical consumable components within the reaction chambers of Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) equipment-core devices in semiconductor chip manufacturing. Their material selection and application demands are exceptionally stringent. Typically installed around wafer carriers (electrostatic chucks), they form part of the process reaction space. In the demanding semiconductor manufacturing environment, the primary role of the deposition ring is to protect expensive core components (such as electrostatic chucks) from contamination and deposition of process byproducts, ensure process uniformity, and maintain chamber cleanliness and stability.
Product performance
- Exceptional Corrosion Resistance: Capable of withstanding erosion from various corrosive, highly reactive plasma gases (e.g., fluorine-based, chlorine-based gases) used in CVD/PVD processes, ensuring extended service life.
- Superior High-Temperature Resistance: Maintains structural stability and performance at process temperatures reaching hundreds or even thousands of degrees Celsius without deformation or melting, demonstrating its characteristics as a high-temperature alumina ceramic.
- High Purity and Low Contamination: High-purity alumina ceramics (e.g., 99.9% or higher) minimize the release of contaminants like metal ions from the material itself into the process chamber under high-temperature and plasma conditions, preventing wafer contamination. Semiconductor-grade applications pursue the ultimate purity of 99.99% alumina ceramics.
- Excellent Mechanical Strength and Hardness: Possesses sufficient rigidity to maintain dimensional stability while withstanding mechanical stresses and installation forces. Robust mechanical properties form the foundation for all forms-whether alumina ceramic plates, alumina ceramic rods (alumina bars), or alumina tubes.
- Superior Insulation: As an insulating material, alumina ceramic does not interfere with the electrostatic chuck's adhesion function for wafers, ensuring process safety and stability.
- Moderate Thermal Conductivity: Helps homogenize the temperature field within the chamber while preventing overheating. This is a valued property for heat dissipation components like alumina ceramic substrates or ceramic cooling plates.
- High Precision and Machinability: Through advanced ceramic forming techniques and precision machining, complex shapes with exceptional dimensional accuracy and surface finish can be achieved.
Product application
- Raw Materials: Require fine alumina powder, especially for high-purity alumina ceramics. Aluminum oxide (Al2O3) is the base chemical.
- Forming and Sintering: Involves alumina ceramic manufacturers who use techniques to produce alumina ceramic blanks, such as alumina blocks, alumina plates (alumina sheets), alumina tubes (al2o3 tube), and alumina discs.
- Precision Machining: Performed by alumina ceramic machining specialists or parts suppliers, transforming blanks into final components like alumina ceramic plates, alumina ceramic rods, or complex alumina ceramic structural parts.
- Other Forms and Applications: Beyond deposition rings, alumina ceramics have diverse semiconductor uses, such as alumina ceramic substrates (al2o3 substrate) for packaging, alumina ceramic membranes, and alumina fiber tubes for insulation.
Certificates and Honors
Our experts possess 20 years of R&D experience in independently developing and manufacturing advanced ceramic materials and precision ceramics, achieving world-class standards. We have been recognized as a National High-Tech Enterprise and are a leading talent project in Shaoxing City, known as the "Hometown of Scholars."
We strictly follow ISO 9001 quality management system to ensure consistency:
- 100% raw material inspection
- Advanced hot-pressing production lines
- In-house testing: density, hardness, microstructure analysis
- Third-party certifications (SGS, CE, ROHS available upon request)
factory strength
We possess advanced technical expertise in sintering, forming, grinding, CNC machining, laser drilling, grinding, and polishing processes, enabling us to customize various ceramic products according to customer specifications.Our digital workshops and smart factories, equipped with real-time data collection systems, leverage lean production principles to minimize waste and maximize resource efficiency. By integrating CNC machining technology, industrial IoT, and automated control systems, we achieve seamless connectivity and collaborative operation among production equipment, thereby maximizing production savings.
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